Осаждение металлического покрытия на графит, кремний и стали (СТ3, 45, 40Х) в условиях ионного ассистирования

Abstract

Analysis of element composition and depth distribution of component in coating formed by self ion-assisted deposition of metal (Ti, Zr, Мо, W) onto graphite, silicon and steels using a method in which the metal deposition was accompanied by bombardment metal ions is reported. Analysis was carried out using Rutherford back scattering method. Elemental analysis of the coatings on graphite, silicon and steels shows a high content of carbon, oxygen. In the given work microhardness of structures covering steel St3, 45, 40Х marks, thin coverings Ti generated by sedimentation and in conditions assisted by ions Ti + is investigated. It is established that ionic-assisted sedimentation of coverings Ti to increase in microhardness of samples from steels 45, 40Х in 1,5−2 times. In work the possible reasons leading to change of microhardness of modified steels are discussed.