Deposition of film coatings with titanium and silver nanoparticles by means of combined magnetron-laser plasma

Abstract

Combination of laser and magnetron plasma creates potential possibilities for obtaining coatings with improved properties. The main feature of this combination is the simultaneous use of two plasma streams, which differ significantly in energy and time characteristics. The effectiveness of the use of magnetron-laser technology was demonstrated by the example of the creation of protective coatings with low coefficient of friction based on carbon, for the deposition of nanosized films, cermet structures, composite coatings, the production of solid lubricants /1-4/. Recently, interest has grown in such structures as dielectric film coatings with the inclusion of a nano-sized semiconductor or metallic phase, for example, silicon nanocrystals in a silicon dioxide matrix, as well as silicon or germanium nanocrystals in an Al 2O3 or SiGeO2. Nanostructures with particles of Au and Ag introduce great possibilities because of the effective absorption of light due to surface plasmon resonance (SPR). To form structures such as an array of metal particles in a solid-state dielectric matrix, magnetron-laser deposition was not used. The purpose of this work was the formation of such structures based on the matrix TiO2 with particles of Ti or Ag.