Metal coatings formation by compression erosion plasma flows interaction with surfaces

Abstract

In the present work the possibility of metal coatings deposition by erosion compression plasma flows (ECPF) is discussed. The formation of erosion flows occurs due to erosion of the electrodes material in the discharge device. The products of the erosion are accelerated by dense compression plasma flows and reach the surface of a sample placed in the chamber. In the work the coating of tungsten, nickel and copper with synthesized in the air residual atmosphere on the silicon surface. In the work the structure and phase composition of the formed coating are discussed.