Surface Morphology and Optical and Electrophysical Properties of Piezoceramic Films Obtained by Laser Deposition in Vacuum

Abstract

Nanostructured thin fi lms on silicon and glass substrates have been obtained using high-frequency repetitively pulsed f ~ 10–12 kHz laser radiation with wavelength λ = 1.064 μm and power density q = 33 MW/cm2 on a piezoceramic PZT-19 target at vacuum chamber pressure p = 2.2∙10–2 mm Hg. The morphology of the thin piezoceramic fi lms was studied using atomic force microscopy. Transmission spectra of the obtained films were investigated in the visible and near- and mid-IR regions. The electrophysical characteristics of PZT-19/Si structures on Si substrate were analyzed.