Microstructure and Properties of Thin Films of Zirconium Produced by High-Frequency Laser Deposition

Abstract

Nanostructured thin fi lms on a silicon substrate were obtained by high-frequency periodic pulse f ~ 6–10 kHz action of laser radiation with wavelength λ = 1.064 μm and power density q = 120 MW/cm2 on zirconium in a vacuum chamber at pressure p = 2.2 Pa. The morphology of the thin fi lms of zirconium was studied by atomic force microscopy. The transmission spectra of the zirconium fi lms in the visible and near and mid IR regions were obtained. The electrophysical characteristics of the Zr/Si structures were analyzed.