The Ion Emission from the Plasma Formed in Ferroelectric Source

Abstract

The experimental studies of active plasma source are presented. The plasma was formed by a noncomplete discharge on the surface of ferroelectric BaTiO 3 samples. We received the spectrum of the discharge using the optical emission spectroscopy method. The spectrum lines corresponded to the atoms and ions of elements related to the ferroelectric (Ba, Ti, O) and residual atmosphere (N). The intensity of the spectrum lines relied on the discharge current and slightly changed depending on the residual gas pressure in range 10 -5 - 10 -3 Тоrr. Under the negative bias voltage the ion current in plasma source was registered