CHANGE OF THE AMORPHOUS CARBON FILMS BY LASER NANOSECOND PULSE IRRADIATION

Abstract

Diamond like carbon (DLC) thin films was deposited, using ion beam deposition (IBD). Samples were irradiated by the first (1064 nm), the second (532 nm), and the third (355 nm) laser harmonics, changing pulse number per spot, irradiation power intensity. After the laser irradiation films were analyzed by scanning electron microscopy (SEM), null-ellipsometry Gaertner L117 operating with He – Ne laser (λHe-Ne = 632.8 nm), Fourier transform infrared (FTIR), and Raman scattering (RS) spectroscopes, Vickers hardness method. After the annealing by first harmonic (70 MW/cm2) caused SiC and nc – Si formation in the substrate boundary, the slight increase of the sp2 C=C sites fraction. A weak influence was on the surface morphology and microhardness values. Using the second, and the third laser harmonics noticeably caused modification of the DLC samples: graphitization process and formation of the SiC and SiOH fractions.