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Please use this identifier to cite or link to this item: https://elib.bsu.by/handle/123456789/25691
Title: Sol-gel dielectric films for SOI technologies
Authors: Vaskevich, V. V.
Kovalenko, D. L.
Gaishun, V. E.
Savitskaya, T. A.
Issue Date: 2012
Publisher: Minsk: Krasiko-Print
Citation: 6-th International Conference on Chemistry and Chemical Education “Sviridov Readings 2012”
URI: http://elib.bsu.by/handle/123456789/25691
Appears in Collections:Статьи химического факультета

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