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https://elib.bsu.by/handle/123456789/233829
Полная запись метаданных
Поле DC | Значение | Язык |
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dc.contributor.author | Saladukhin, I. A. | |
dc.contributor.author | Abadias, G. | |
dc.contributor.author | Zlotski, S. V. | |
dc.contributor.author | Malashevich, A. A. | |
dc.date.accessioned | 2019-11-13T10:39:25Z | - |
dc.date.available | 2019-11-13T10:39:25Z | - |
dc.date.issued | 2019 | |
dc.identifier.citation | Взаимодействие излучений с твердым телом = Interaction of Radiation with Solids : материалы 13-й Междунар. конф., Минск, Беларусь, 30 сент. – 3 окт. 2019 г. / редкол.: В. В. Углов (отв. ред.) [и др.]. – Минск : БГУ, 2019. – С. 435-437. | |
dc.identifier.issn | 2663-9939 | |
dc.identifier.uri | http://elib.bsu.by/handle/123456789/233829 | - |
dc.description | Секция 5. Влияние излучений на структуру и свойства покрытий = Section 5. Radiation Influence on Coatings Structure and Properties | |
dc.description.abstract | In the present work the phase composition stability and oxidation resistance of ~300 nm thick ZrN/SiNx nanoscale multilayers at the air annealing procedure were studied. Coatings were prepared by reactive magnetron sputter-deposition on Si wafers under Ar+N2 plasma discharges. ZrN/SiNx multilayers with ZrN and SiNx layer thickness varying from 2 to 10 nm were synthesized by sequential sputtering from elemental Zr and Si3N4 targets at T dep =300 °C. According to X-ray diffraction (XRD) analysis the multilayered films consist of nanocrystalline (002)-oriented ZrN and amorphous SiNx layers. The oxidation resistance under air was studied using in situ XRD in the temperature range from 400 to 950 °C, as well as by scanning electron microscopy (SEM) and wavelength dispersive X-ray spectrometry (WDS) after air annealing procedure. While the reference ZrN film starts to oxidize at Tox. = 550 °C, a much higher oxidation resistance is found for multilayered films, till Tox. = 860–950 °C for ZrN/SiNx coatings with the elementary layer thickness ratio of 5 nm/10 nm and 2 nm/5 nm. | |
dc.language.iso | en | |
dc.publisher | Минск : БГУ | |
dc.subject | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика | |
dc.title | Phase Composition Stability of ZrN/SiNх Multilayered Coatings under Air Annealing: the Role of the Thicknesses Ratio of the Elementary Layers | |
dc.type | conference paper | |
Располагается в коллекциях: | 2019. Взаимодействие излучений с твердым телом = Interaction of Radiation with Solids |
Полный текст документа:
Файл | Описание | Размер | Формат | |
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435-437.pdf | 462,25 kB | Adobe PDF | Открыть |
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