Мембранные сенсорные элементы на основе анодного оксида алюминия для микро- и оптоэлектромеханических систем

Abstract

High-order nanostructured anodic porous alumina matrices are characterized by the regular arrangement of nanopores from 5 to 400 nm in diameter, high pore density in the range of 108-1011 cm-2, and length of pore channels from tens of nanometers to hundreds micrometers. Pore structure parameters of alumina (i.e. diameter, length, and pore spacing) can be controlled by the anodization regimes such as an electrolyte composition, electrolyte concentration and temperature, and the anodization voltage. The volumetric-surface variant of the capacitive MDM (metal-dielectric-metal) structure of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements was designed. The improved humidity sensitivity, reduced response and recovery time over a wide humidity range were obtained due to preparing of alumina membranes with open-ended and widened pores without the barrier layer