Non-destructive material homogeneity evaluation using scanning near field millimeter wave microscopy

Abstract

Millimeter wave bridge technique for non-destructive material homogeneity characterization is described. The idea of this technique is the local excitation of the millimeter waves in the testing material and the measurement of the transmitted (reflected) wave amplitude and phase in different places of it, i.e. the material plate is scanned by the beam of the millimeter waves. Same results of the homogeneity measurements for dielectric wafers are presented. The measurement technique sensitivity is discussed.