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Please use this identifier to cite or link to this item: https://elib.bsu.by/handle/123456789/223255
Title: Effects on energetic impact of atomic clusters with surfaces
Authors: Popok, V. N.
Vuckovic, S.
Abdela, A.
Campbell, E. E. B.
Issue Date: 2007
Publisher: Минск : Изд. центр БГУ
Citation: Взаимодействие излучений с твердым телом = Interaction of radiation witli solids : материалы 7-й Междунар. конф., Минск, 26-28 сент. 2007 г. / редкол. В. М. Анищик (отв. ред.) [и др.]. — Минск : Изд. центр БГУ, 2007. — С. 18-20.
Abstract: A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Cluster beams are efficient tools for manipulating agglomerates of atoms providing control over the synthesis as well as modification of surfaces on the nm-scale. The application of cluster beams for technological purposes requires knowledge of the physics of cluster-surface impact. This has some significant differences compared to monomer ion - surface interactions. The main effects of clustersurface collisions are discussed. Recent results obtained in experiments on silicon surface nanostructuring using keV-energy implantation of inert gas cluster ions are presented and compared with molecular dynamics (MD) simulations.
URI: http://elib.bsu.by/handle/123456789/223255
ISBN: 978-985-476-530-3
Appears in Collections:2007. Взаимодействие излучений с твердым телом

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