Спектральные характеристики сильно легированных пленок поликристаллического кремния

Abstract

The spectral dependences of coefficient of absorption and refractive index in highly phosphorus doped polycrystalline silicon in the IR wavelength region were considered with allowance for the dispersion of real part of refractive index. The existence of three different branches of the coefficient of absorption, connected with different absorption mechanisms of electromagnetic energy by the medium was shown. The spectral dependence of the dielectric constant of polycrystalline silicon was analysed.