Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/208399| Title: | Спектроскопическая система контроля процессов формирования покрытий для установок вакуумно-плазменной технологии |
| Other Titles: | Specrtoscopic control system of coating formation processes for vacuum-plasma processing plants / N.N. Nikiforenko, A.P. Burmakov, A.A. Labuda, A.E. Sikolenko, V.P. Bondarionok |
| Authors: | Никифоренко, Н. Н. Бурмаков, А. П. Лабуда, А. А. Сиколенко, А. Е. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 2003 |
| Publisher: | Минск : БГУ |
| Citation: | Взаимодействие излучений с твердым телом: материалы V междунар. науч. конф., 6-9 окт. 2003 г., Минск. — Мн.: БГУ, 2003. — С. 379-380. |
| Abstract: | Создана система для контроля спектрального коэффициента отражения и (или) коэффициента пропускания изделий или свидетеля, перемещающихся или неподвижных в процессе нанесения плёночных покрытий методами вакуумно-плазменной технологии. В качестве основной информации на экране монитора компьютера в реальном времени представлен график зависимости коэффициента отражения покрытия в процентах от длины волны в пределах всего рабочего спектрального диапазона (рекомендуемый - от 380 до 840 нм). Применение системы особенно эффективно в технологии создания сложных оптических покрытий (просветляющих, отражающих, интерференционных светофильтров). В качестве регистратора спектра в системе контроля используется малогабаритный двухканальный дифракционный спектрограф SL40-2-2048USB с ПЗС-линейкой Toshiba TCD1205D, обеспечивающие спектральное разрешение не хуже 1,5 нм. |
| Abstract (in another language): | The system includes the following: compact two-channel diffraction spectrograph SL40-2-2048 (the spectrograph uses TCD-scale Toshiba TCD1205D), optical signal shaping device, optical signal shaping device power unit, spare parts, PC and operating manual. The system provides vacuum processing plants with coatication of coatings with different types spray nodes (magnetron, arc, thermal, electron-beam and others). The application of the system is especially effective in the technology of complex optical coatings creation (antireflective , reflective, interferential light filters). Its informational capacities far and away surpass those of conventional control systems of coating reflectance on the selected fixed wavelength or coating width control systems (for instance on piezosensors). The system is mostly designed to inspect spectral reflectance and/or transmittance of samples (articles, witness) moving in the process of coatication of film coatings with the help of devices of rotor type or linear type (or fixed). The diagram of coating reflectance dependency (in %) on wavelength within overall spectral range is shown in PC display as the main information. Registration process mode is continuous with exposure of 8, 16, 24, 32 milliseconds. The system also provides express postprocess inspection and registration of reflectance spectrum and transmission spectrum of created coating. Working spectral range of the system (recommended) from 380 nanometers to 840 nanometers (can be changed in accordance with customer's wish). Spectral resolution - not worse than 1,5 nanometers. System operation control and results indication is done via PC. Computer requirements: Processor - not lower that P166 MHz, operational system - Windows 9X or 2000. System's SW allows: to adjust the system, to control graphically the reflectance and/or transmittance of samples within overall working range in real time, to compare in the process of workflow spectral characteristic being registered with the best article characteristic; to run a express post-process inspection and registration of reflectance spectrum and transmission spectrum of created coating, to store, view, processes and print inspection results. On-line spectral inspection system can be realized for simultaneous registration of spectral characteristics of reflection and transmission in the process of coatication of coatings (one spectrograph uses two channels), The system can be additionally provided with optical and mechanical detachable device and the corresponding computer program for post-process inspection of width, refractive exponent and chromaticity coordinates of created single-layer coating ( by using the same spectrometer but in case of switching the optical wave-guides to the above-mentioned detachable device). Chromaticity coordinates can also be defined in the process of thin-film structure coatication. |
| URI: | http://elib.bsu.by/handle/123456789/208399 |
| ISBN: | 985-445-236-0; 985-445-235-2 |
| Appears in Collections: | 2003. Взаимодействие излучений с твердым телом |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 379-380.pdf | 2,21 MB | Adobe PDF | View/Open |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.