Comparative investigation of surface roughness by X-ray reflection and probe microscopy

Abstract

We report the results of a comparative analysis on the surface roughness of glass substrates by the methods of X-ray reflectivity (XR) and atomic-force microscopy (AFM). Based on the AFM data, the parameters of the effective roughness that determines reflectivity of x-ray radiation have been calculated. It is shown that the effective rms roughness values and angular dependencies of the reflection coefficient in the x-ray range of wavelengths, calculated from the AFM profiles of substrates surface, are in good agreement with the XR measurement data.