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Формирование слоев Сх→зМу→4 методом высокодозной имплантации азота в систему Si3N4/C/Si3N4/Si 58

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Формирование слоев Сх→зМу→4 методом высокодозной имплантации азота в систему Si3N4/C/Si3N4/Si 1 2 0 0 2 4 0

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