Browsing "2001. Взаимодействие излучений с твердым телом" by Author Dobrushkin, V. A.
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Preview | Issue Date | Title | Author(s) |
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2001 | Simulation of plasma assisted doping of silicon | Velichko, O. I.; Dobrushkin, V. A.; Tsurko, V. A.; Senko, N. A. |