Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/196213
Title: | Установка для нанесения слоев методом динамического ионного перемешивания |
Authors: | Карват, Чеслав |
Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
Issue Date: | 2001 |
Publisher: | Минск : БГУ |
Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 2001. - № 1. – С. 31-34. |
Abstract: | A novel type of the apparatus for disposition of layers by the dynamic ion-beam mixing and ion-beam assistence is treated. The main functional factures of this system are discussed. |
URI: | http://elib.bsu.by/handle/123456789/196213 |
ISSN: | 0321-0367 |
Licence: | info:eu-repo/semantics/openAccess |
Appears in Collections: | 2001, №1 (январь) |
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