Browsing "НИУ "Институт прикладных физических проблем им. А. Н. Севченко"" by Author Yang, J.-H.
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Preview | Issue Date | Title | Author(s) |
| 2018 | Measurements of microstructural, chemical, optical, and electrical properties of silicon-oxygen-nitrogen films prepared by plasma-enhanced atomic layer deposition | Ma, H.-P.; Lu, H.-L.; Yang, J.-H.; Li, X.-X.; Wang, T.; Huang, W.; Yuan, G.-J.; Komarov, F.F.; Zhang, D.W. |