Surface damage in TiO2 and Al2O3 induced by swift heavy ions

Abstract

In this paper we summarize results of AFM and TEM studies of surface defects in titanium and aluminum oxide single crystals irradiated with high energy Xe and Bi ions. The formation of nanoscale hillocks subtended by conically shaped low density zones has been observed over a wide range of electronic stopping powers and irradiation temperatures. Analysis of experimental data obtained from targets with thickness less than the projected ion range indicated that the hillocks are produced on both the entrance and exit surface of the specimen. HRTEM/STEM examination has revealed that the hillocks are crystalline in nature. The relationship between the latent track morphology in the near surface region and hillocks is discussed