Начальная стадия воздействия потока заряженных частиц на процессы в диффузионной зоне

Abstract

В работе представлена математическая модель начальной стадии процесса внедрения ионов в поверхность металла в неизотермических условиях. В модели учитывается конечность времен релаксации потоков тепла и массы, взаимодействие разномасштабных явлений. Исследовано взаимовлияние полей концентрации внедряемой примеси, напряжений и деформаций, возникающих вследствие удара частиц о поверхность подложки, а также температуры мишени = Each stage of technological and technical development is directly connected with the improvement of operational properties of materials. Vacuum ion-plasma methods are widely used for enhancing material properties (such as wear resistance, fatigue strength, corrosion resistance and others) and also for modifying the surface layer composition. But the achievement of extensive experimental results requires detailed theoretical studies in this area. The treatment of a metal surface by ion beam is accompanied by a variety of physical and chemical phenomena. It is known that the particle impact on the target surface leads to the appearance of stresses. The investigations of stress (or strain) propagation can be found elsewhere. But the processes of impurity introduce and stress redistributions are interdependent in these papers. There are a lot studies aimed to investigation of changes of morphology, roughness, surface chemistry and adhesion strength of the system coating/substrate after ion implantation. The paper is aimed at investigating the initial stage of ion implantation process into target. The model allows considering the processes occurring after interaction of ions flux with target surface. Assume that ions have sufficient energy for generation mechanical perturbations. The paper presents a non-isothermal model of the initial stage of ion implantation process. The model takes into account the finiteness of heat and mass relaxation times. The model assumes that the implantable impurity generates mechanical perturbations. Examples of the waveform evolution in some time moments are shown