Long-range scans and many-beam effects for high-resolution x-ray diffraction from multilayered structures: Experiment and theory

Abstract

A covariant matrix method based on many-beam dynamical x-ray diffraction is reported for simulation of the wide x-ray diffraction profiles from multilayered crystalline samples both in coplanar and noncoplanar geometries. Because of many-wave scattering, the approximations of the second-order on x-ray polarizability both for dispersion equations and boundary conditions are taken into account. The influence of various factors on calculation of the x-ray profiles containing multiple Bragg reflections is investigated.