Browsing by Author Rusetsky, A. M.
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| Preview | Issue Date | Title | Author(s) |
|---|---|---|---|
| 1999 | Formation of buried high-resitant layers in silicon by two-step substoichiometric implantation of nitrogen IONS | Kamyshan, A. S.; Solov’yev, V. S.; Rusetsky, A. M. |