Browsing by Author Miskevich, S. A.
Showing results 1 to 2 of 2
Preview | Issue Date | Title | Author(s) |
| 2012 | Controlling Boron Diffusion during Rapid Thermal Annealing with CoImplantation by Amphoteric Impurity Atoms | Makarevich, Yu. V.; Komarov, F. F.; Komarov, A. F.; Mironov, A. M.; Zayats, G. M.; Miskevich, S. A. |
| 2015 | Formation of InAs Nanoclusters in Silicon by High-Dose Ion Implantation: Experimental Data and Simulation Results | Komarov, A. F.; Komarov, F. F.; Mil’chanin, O. V.; Vlasukova, L. A.; Parkhomenko, I. N.; Mikhailov, V. V.; Mokhovikov, M. A.; Miskevich, S. A. |