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Browsing by Author Demidovich, Sergey

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Preview	Issue Date	Title	Author(s)
	2023	Effect of Rapid Thermal Annealing on Si-Based Dielectric Films Grown by ICP-CVD	Parkhomenko, Irina; Vlasukova, Liudmila; Komarov, Fadei; Kovalchuk, Nataliya; Demidovich, Sergey; Zhussupbekova, Ainur; Zhussupbekov, Kuanysh; Shvets, Igor V.; Milchanin, Oleg; Zhigulin, Dmitry; Romanov, Ivan

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